クリーンルームストッカーシステム

The space in the production line of the back-end package semiconductor plant is usually limited. To use the narrow space around the equipment more flexibly and to improve the efficiency of the cassatte stocking space, MIRLE developed the Clean Room Tower Stocker solution. The size of a Tower Stocker is similar to an elevator; its up and down speed is 120m/min, which makes it easy for cross-floor conveying operation. It can agilely perform the ascending, descending, retrieving, and placing actions, and it has an airflow control design that meets the high cleanliness requirements.MIRLE provides a higher level of customized design solutions based on its experiences in the FPD and semiconductor industries. With the 3D logistics simulation aid, MIRLE helps the customer achieve maximum efficiency in the limited factory space.
  • Tower Stocker
  • Zip Stocker
  • Foup Stocker
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