機器フロントエンドモジュール (EFEM)

The EFEM (Equipment Front End Module) serves as the Loader/Unloader in the semiconductor plant. EFEM is an automation module suitable for different wafer sizes and is ideal for front-end semiconductor operations.

MIRLE has many experienced engineers; they can significantly reduce the risk and time of implement EFEM. They can quickly select of the suitable front-end robot, set up the EFEM with the equipment, and link the communication between SECS/GEM and the host system, as well as the BC (Block Control) integration.