機器フロントエンドモジュール (EFEM)

The MIRLE EFEM can be adjusted flexibly according to the requirements of the respective production process. In a plant that demands a higher Clean Room environment level, the EFEM can be operated corresponding to ISO Class 1-Class 1000.

In the meantime, the MIRLE EFEM is equipped with the ability to follow the Semi SECS/GEM 300 communication. When used in the automated factory, this interface can start and stop the equipment processing, collect the measured data, change the variable and select the recipe.